Electrode size dependence of piezoelectric response of lead zirconate titanate thin films measured by double beam laser interferometry

نویسندگان

  • S. Sivaramakrishnan
  • P. Mardilovich
  • A. Mason
  • A. Roelofs
  • T. Schmitz-Kempen
  • S. Tiedke
چکیده

titanate thin films measured by double beam laser interferometry S. Sivaramakrishnan, P. Mardilovich, A. Mason, A. Roelofs, T. Schmitz-Kempen, and S. Tiedke Hewlett Packard Company, 1070 NE Circle Blvd., Corvallis, Oregon 97330, USA Materials Science, School of Mechanical, Industrial, and Manufacturing Engineering, Oregon State University, Corvallis, Oregon 97331, USA Center for Nanoscale Materials, Argonne National Laboratory, 9700 S Cass Ave, Argonne, Illinois 60439, USA aixACCT Systems GmbH, Talbotstr. 25, 52068 Aachen, Germany

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تاریخ انتشار 2013